RF Plasma Generator

  • product ID:83

  • RF 600w Plasma Generator


    Specification:

  • RF 600W Plasma Generator

     

    600 Watts RF Power at 13.56MHz

    for Industrial and Laboratory applications.


    FEATURING:

       13.56 MHz up to 600 Watts in peak power
       Low harmonic level at
         550W h2≤-40 dBc, h3 and higher < -50 dBc
       Measuring forward, reflected and power VSWR simultaneously
       Back Panel Control & Moni- toring of all Generator’s functions.
    Data acquisition: Status Monitoring & Power Measurement via Analog Port
       AGC Power Leveling: Output Power Control to better than ±5W of set value.
       Pulse operation in MGC/ Burst mode

    OUTPUT PROTECTION:

        0613 is protected by its internal monitoring system for 600 Watts of total Forward Power
        and 8:1 VSWR above the level of 80W.
        This will protect the RF power supply output stage from extreme mismatch at the Output.


    RF Power Supply Specifications:
     
    Class Of Operation
    Class B

    Frequency Of Operation
    13.56 MHz

    Frequency Stability
    0.005% or better

    RF Power Output
    600 Watts into 50 Ohm nominal

    Operation as amplifier. Contact ASHERN for further details.
    Output as amplifier in MGC/Burst Mode
    0 dBm IN, 4V CTL IN pin 5   400W +/-3W
    Note: Scale for MGC is not linear.

    RF Input Drive (as amplifier)
    Typical range -20 dBm to 0 dBm 4V CTL IN pin 5

    RF Input Drive for AGC Recommended +0 to +3 dBm for the best operation

    Input Drive Source(amplifier) Signal or function generator,
    analog computer input capable of up to 2 Vp-p @ 50 Ohm

    Internal RF Source
    Crystal oscillator at 13.56 MHz

    Input and Output Impedance
    50 Ohm

    IN / OUT VSWR
    1.2:1 max - input
    3:1 max - output
     
    Output VSWR Protection
    80 Watts max reflected power limit. Automatic, limits typically within 0.5 ms
    after reverse power reaches 80 Watts or power amplifier current preset limit.

    Harmonic Level @ 550W Better then - 40 dBc for 2-nd harmonic,
    any other > -50 dBc

    Spurious Output
    - 76 dBm equivalent noise level generated by internal circuits

    Output Blanking
    For pulsed applications, ASHERN amplifiers and generators offer blanking of
    the output signal for minimum noise RF spectrum

    Dynamic Power Range
    0 to 600W, settings within +/- 5W

    Output Settings & Control
    (Communications)
    SubD 25 Analog and Digital I/O . Port power scale 1V=100W. Rear Panel

    Pulse Specifications
    Pulse Width from 2 μs to contin- ues, user defined.

    RF Power Margin
    (Open Loop Max Power/Rated Power)-1)*100
    20 %

    RF Connectors INPUT BNC Female OUTPUT N Female
    BLANKING BNC Female
    Rear Panel
     
    AC Power Source
    200 to 240 VAC, +/- 10%,
    47 - 63 Hz
    broad input voltage, with no adjustment required

    AC Power Connection IEC Standard Power Entry followed
    by RFI filter.
    Filter range 0.1 to 30 MHz min.

    AC Circuit Protection Internally fused on the main DC Power Supply, 15A.

    AC Input Current (RMS)
    RF Out 600W:
    I : 6.5A @ 220V

    Cooling
    Forced air, temperature controlled, heatsink temperature monitored for equipment safety
    at 70C limit.

    Dimensions
    H135mm x W211mm x L356mm
    ( 5.25” x 8.3” x 14” )

    Weight
    7 kg, 15.4 lbs.

    Mounting

    Half Rack, 3U high. Optional: Rack Mount Kit, Adapter Kit, Coupling Screws.

    Environmental conditions Temp.: 10° to 35° C ambient Humidity: 80%
    Equipment intended for ISM appli-
    cations in laboratory and light in- dustrial environment.