E-Beam System

  • product ID:80

  • UHV E-Beam System


    Specification:

  • Evaporation system

    Type

    Evaporation

    E-Beam

    Thermal

    single  20 cc 3×200A ( 15V)
    4×7 cc 3KW
    3KW 　
    6KW 　
    Ultimate 　 　
    pressure 5×10-7 5×10-7
    (Torr ) 5×10-9 5×10-9
    Pressure Control Option option
    Follow Option Option
    Control
    Heating 400 ℃ 400 ℃
    　
    Substrate 2"  2" 
    Base 3"  3" 
    4" 4"
    　 6" 6"
    　 2"×5 pcs 2"×5 pcs
    Rotation 30 - 120 rpm 30 - 120 rpm
    Deposition assisted Ion-assisted Ion-assisted
    ION 3 cm ION 3 cm
    　 Plasma clean Plasma clean
    　    
    　 Base Bias Base bias
    　    
    Load-lock Option Option
    ≧3" ≧3"
    2" multi-pieces 2" multi-pieces
    Manual/Auto Manual/Auto
       
    Control ＰＬＣ＋Manual ＰＬＣ＋Manual
      ＰＬＣ＋ＰＣ ＰＬＣ＋ＰＣ
    　 　 　
    Function Control Vacuum:Auto/Semi-auto Vacuum:Auto/Semi-auto
         
    　 Process:Manual/Auto Process:Manual/Auto
    　    
    　 Record & Monitor:option Record & Monitor:option
    　  (Option)  (Option)
    　 Safety Safety
    　    
    Valve Pneumatic Pneumatic
    Control    
    　 　
    Vacuum Gauge Ion/Cold-Cathode/TC. Ion/Cold-Cathode/TC.
    　
    Digital Display Digital Display
    　
    　
    Rack Instrument and Control System integrated Instrument and Control System integrated
    　 　

     

     We have many experiences in this kind of equipments,

    If you interest in this machine, Please contact our sales representative.

    Thanks!