Thermal Evaporation System

  • product ID:96

  • Thermal Evaporation System


    Specification:

  •  

     

    LJ  HV/ UHV Thin Film System

    Thin Film

    Source

    		 　 　 　 　

    Thermal

    		 　 　
    3×200A ( 15V) 　 　 　
    3KW 　 　
    　 　 　
    　 　 　 　
    Vacuum pressure(Torr ) 　 MP TP CP
    5×10-7              (HV) 350 l/min 360 l/sec N/A
    ★5×10-9        (UHV) 350 l/min 360 l/sec 3000 l/min
    Pressure Control Option 　 　 　
    　 　
    Mass Flow Control Option 　 　
    　 　
    　 　
    Heater 320 ℃ PID temperature control
    Substrate               Holder 　 　 　
    customer request 　 　
    　 　 　
      　 　
    Rotation speed 10 - 120 rpm 　 　
    　 　
    Assist ★Ion Source  3 cm 　 Option 　
    ★Plasma Clean 　 Option 　
    ★Base Bias 　 Option 　
    Load-lock chamber Option 　 　
    ★≧3" 　 　
    ★2" multi-piece 　 　
    　 　 　
    Operation control ＰＬＣ＋ control interface 　 　
    ★ＰＬＣ＋ＰＣ 　 　
    　 　 　
    Control Functions Vacuum 　Auto/Semi-auto 　 　
    ★Process　manual/Auto (Option) 　 　
    ★record monitor (Option) 　 　
    safety interlock 　 　
    Valve control Pneumatic 　 　
    　 　
    Vacuum Gauge Ion/TC gauge 　 　
    Digital display 　 　
    Rack 　 　
    　 　
    　 　 　
    ★ is optional      

     

    If you have any question about this equipment,

    Please connect our sales representative.

    We will do our best service for you.