Ion Deposition System
3 cm Ion Source 5 cm Ion Source
12 cm Ion Source
ION SOURCE SELECTION GUIDE
Selecting the correct model from this broad range of ion sources can be somewhat intimidating. We offer assistance in the correct selection of ion sources for your application through this Ion Source Selection Guide or by contacting one of the We technical sales engineers at 1-800-4-SOURCE.
This Ion Source Selection Guide contains information and tables to assist in identifying which source technology, configuration, and size is most appropriate for given applications. Taken into consideration are process conditions, mounting configurations, substrate sizes and neutralization requirements. In order to most effectively select the correct ion source for a specific process, please take a few minutes to carefully go through this Ion Source Selection Guide.
If at any point further assistance is needed, please do not hesitate to give us a call. This source selection process should assist to identify the following:
· What type and size of Ion Beam Source required
· Gridless - End Hall or Anode Layer Source (ALS)
· Gridded – Radio Frequency (RF) or Direct Current (DC)
· What grid type is needed
· How the ion source should be mounted
· Internal or on an external flange to your vacuum system
· If and what type of neutralizer is required
Background
Our ion sources have been optimized to perform over a wide range of process conditions and are capable of meeting most application needs. The following table contains benefits that ion sources provide for common applications, along with guidelines on which gasses and ion beam energies are typically used. It is important to keep gasses and energies in mind while going through this selection process to identify the most appropriate source for your application.
Ion Source Selection Guide (Please click here)
