PLD System
Sample
多靶濺鍍靶座
TG-0203
Multi targets manipulator
2” multi targets manipulator set (three targets) Specifications
Target 0203
Target size
2 inches diameter
manipulator
Three(3) targets
Revolution
Manual setting
Divide into 3 parts in a circular.
With fixed position setting
Rotation
0 -60 rpm speed changeable
Motion drive
DC motor with speed controller
Flanges
Main flange
8” CF Vacuum
Range
5x10-8 Torr
Leak Test
5×10-9 cc/sec of He
Drive Motor
Rated volt
DC 24V
Rated torque
130 g-cm Rated speed
6160 rpm
Rated current
≦ 500 ma
Reduction ratio
1 : 51
Rated speed (Reduction)
121 rpm
Rated output
8.5W
