Plasma Cracker Atom Source
Plasma Cracker Atom Source
Model: PCAS
Part Number: LJPCS-N63
■ Radio frequency plasma
■ For Oxygen, Nitrogen, Hydrogen
■ Filamentless design
■ Unique coaxial design
■ Integral water cooling jacket (option)
■ Ideal for MBE and many other applications
DESIGN FEATURES
■ Mounting flange:
4.5” (NW 63CF) ■ UHV compatible ■ Bakeable: 200 C ■ Power: 500 W max. at 13.56 MHz
■ Integral water cooling (RF coil and jacket) ■ In vacuum length:
300 mm ■ Beam diameter:
23 mm at source ■ Gas flow rate typically ∼ 1 sccm ■ Manual tuning as standard ■ Growth Rates Up to 4 um/hr
■ Power supply: 200 W and 600 W available
Options:
■ Integrated shutter
■ Autotuning unit
■ Viewport: Provides a direct view of the plasma from the rear
■ Differential pumping: Extends the operational range of working pressures
into the 10-7 and 10-8 mbar range
■ Plasma monitor: Provides a readout of the plasma intensity
■ Plasma controller: Stabilises the plasma brightness
■ Ion trap: Deflects residual ion current out of the beam
Specifications
RF Power Level..................................200 - 600 Watts
Gas Flow Rate..........................................0.1-5 SCCM
Flange............................................................4.50 " CF
Water Cooling.............................0.17 GPM Flow Rate
RF Matching Network.........................Manually Tuned
Plasma Chamber....................PBN, Alumina or Quartz
