Parts
  • Ion Source
  • Plasma Cracker Atom Source
  • Rotary Feedthrough
  • Linear Feedthrough
  • Manipulator
  • Sputtering Cathode
  • Heater
  • Chamber and component
  • Materials
UHV reaction system
  • Chemical vapor deposition CVD
  • E-Beam System
  • Thermal Evaporation System
  • Sputtering System
  • Exhaust Treatment System
  • PLD System
  • In Line sputtering System
  • Ion Deposition System
Industry Applications
  • DC Plasma Generator
  • RF Plasma Generator
  • Vacuum gauges and controllers
  • Thin Film Deposition Controller
  • Ion source application
  • Electro-Polishing
  • System / Pump maintenance and troubleshooting

Heater

  • .Two inches UHV heater set
  • .Three inches UHV heater set
  • .4 inches UHV heater set
  • .Two inches O2 compatiable heater
  • .3 inches O2 compatiable heater set
  • .4 inches O2 compatiable heater set
  • .Up/Down and Rotation Heater Module
  • .Quartz IR Lamp Heater

  • product ID:101
  • Up/Down and Rotation Heater Module


    Specification:






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1F, No.69, Sec. 1, Lioujia 1st Rd., Jhubei City, Hsinchu County 302, Taiwan(R.O.C.)   Tel: 886-3-5509606   Fax: 886-3-5505134
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